Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6624064 | Chamber seasoning method to improve adhesion of F-containing dielectric film to metal for VLSI application | Turgut Sahin, Ming Xi | 2003-09-23 |
| 6589610 | Deposition chamber and method for depositing low dielectric constant films | Shijian Li, Fred C. Redeker, Tetsuya Ishikawa, Alan W. Collins | 2003-07-08 |
| 6511923 | Deposition of stable dielectric films | Michael Barnes, Thanh Pham, Farhad Moghadam | 2003-01-28 |