Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6633076 | Methods and apparatus for producing stable low k FSG film for HDP-CVD | Padmanabhan Krishnaraj, Robert Duncan, Joseph D'Souza, Nasreen Chopra, Kimberly Branshaw | 2003-10-14 |
| 6596123 | Method and apparatus for cleaning a semiconductor wafer processing system | Michael Kwan, Jalel Hamila, Padmanabhan Krishnaraj, Zhengquan Tan | 2003-07-22 |
| 6589610 | Deposition chamber and method for depositing low dielectric constant films | Shijian Li, Yaxin Wang, Fred C. Redeker, Tetsuya Ishikawa | 2003-07-08 |
| 6511922 | Methods and apparatus for producing stable low k FSG film for HDP-CVD | Padmanabhan Krishnaraj, Robert Duncan, Joseph D'Souza, Nasreen Chopra, Kimberly Branshaw | 2003-01-28 |