Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6633076 | Methods and apparatus for producing stable low k FSG film for HDP-CVD | Padmanabhan Krishnaraj, Joseph D'Souza, Alan W. Collins, Nasreen Chopra, Kimberly Branshaw | 2003-10-14 |
| 6511922 | Methods and apparatus for producing stable low k FSG film for HDP-CVD | Padmanabhan Krishnaraj, Joseph D'Souza, Alan W. Collins, Nasreen Chopra, Kimberly Branshaw | 2003-01-28 |