Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635144 | Apparatus and method for detecting an end point of chamber cleaning in semiconductor equipment | Zhenjiang Cui, Shamouil Shamouilian | 2003-10-21 |
| 6633076 | Methods and apparatus for producing stable low k FSG film for HDP-CVD | Robert Duncan, Joseph D'Souza, Alan W. Collins, Nasreen Chopra, Kimberly Branshaw | 2003-10-14 |
| 6596123 | Method and apparatus for cleaning a semiconductor wafer processing system | Michael Kwan, Alan W. Collins, Jalel Hamila, Zhengquan Tan | 2003-07-22 |
| 6511922 | Methods and apparatus for producing stable low k FSG film for HDP-CVD | Robert Duncan, Joseph D'Souza, Alan W. Collins, Nasreen Chopra, Kimberly Branshaw | 2003-01-28 |