Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6596123 | Method and apparatus for cleaning a semiconductor wafer processing system | Michael Kwan, Alan W. Collins, Jalel Hamila, Padmanabhan Krishnaraj | 2003-07-22 |
| 6596653 | Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD | Dongqing Li, Walter Zygmunt, Tetsuya Ishikawa | 2003-07-22 |