Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6596653 | Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD | Zhengquan Tan, Dongqing Li, Tetsuya Ishikawa | 2003-07-22 |
| 6579811 | Method and apparatus for modifying the profile of narrow, high-aspect-ratio gaps through wafer heating | Pravin K. Narwankar, Sameer Desai, Turgut Sahin, Laxman Murugesh | 2003-06-17 |