Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6579811 | Method and apparatus for modifying the profile of narrow, high-aspect-ratio gaps through wafer heating | Pravin K. Narwankar, Sameer Desai, Walter Zygmunt, Turgut Sahin | 2003-06-17 |