Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617266 | Barium strontium titanate annealing process | Annabel Nickles, Ravi Rajagopalan | 2003-09-09 |
| 6579811 | Method and apparatus for modifying the profile of narrow, high-aspect-ratio gaps through wafer heating | Sameer Desai, Walter Zygmunt, Turgut Sahin, Laxman Murugesh | 2003-06-17 |
| 6573150 | Integration of CVD tantalum oxide with titanium nitride and tantalum nitride to form MIM capacitors | Randall S. Urdahl, Shankarrram A. Athreya, Asher Sinensky, Andrea M. Mendoza | 2003-06-03 |
| 6548368 | Method of forming a MIS capacitor | Ravi Rajagopalan | 2003-04-15 |
| 6534360 | Process for depositing layers on a semiconductor wafer | Jun Zhao | 2003-03-18 |
| 6518203 | Method and apparatus for integrating a metal nitride film in a semiconductor device | Turgut Sahin | 2003-02-11 |