Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6573150 | Integration of CVD tantalum oxide with titanium nitride and tantalum nitride to form MIM capacitors | Randall S. Urdahl, Pravin K. Narwankar, Shankarrram A. Athreya, Asher Sinensky | 2003-06-03 |