Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6624064 | Chamber seasoning method to improve adhesion of F-containing dielectric film to metal for VLSI application | Yaxin Wang, Ming Xi | 2003-09-23 |
| 6579811 | Method and apparatus for modifying the profile of narrow, high-aspect-ratio gaps through wafer heating | Pravin K. Narwankar, Sameer Desai, Walter Zygmunt, Laxman Murugesh | 2003-06-17 |
| 6518203 | Method and apparatus for integrating a metal nitride film in a semiconductor device | Pravin K. Narwankar | 2003-02-11 |