Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6632735 | Method of depositing low dielectric constant carbon doped silicon oxide | Wai-Fan Yau, Ju-Hyung Lee, Tzu-Fang Huang, David Cheung, Farhad Moghadam +5 more | 2003-10-14 |
| 6633076 | Methods and apparatus for producing stable low k FSG film for HDP-CVD | Padmanabhan Krishnaraj, Robert Duncan, Joseph D'Souza, Alan W. Collins, Kimberly Branshaw | 2003-10-14 |
| 6511922 | Methods and apparatus for producing stable low k FSG film for HDP-CVD | Padmanabhan Krishnaraj, Robert Duncan, Joseph D'Souza, Alan W. Collins, Kimberly Branshaw | 2003-01-28 |