Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6639783 | Multi-layer ceramic electrostatic chuck with integrated channel | You Wang, Ananda H. Kumar | 2003-10-28 |
| 6635144 | Apparatus and method for detecting an end point of chamber cleaning in semiconductor equipment | Zhenjiang Cui, Padmanabhan Krishnaraj | 2003-10-21 |
| 6581612 | Chamber cleaning with fluorides of iodine | Peter Loewenhardt, Pavel Ionov, Pamanabhan Krishnaraj | 2003-06-24 |
| 6581275 | Fabricating an electrostatic chuck having plasma resistant gas conduits | Kadthala Ramaya Narendrnath, Dennis S. Grimard | 2003-06-24 |
| 6583980 | Substrate support tolerant to thermal expansion stresses | You Wang, Arnold Kholodenko, Alexander Veytser, Wing Cheng | 2003-06-24 |
| 6557248 | Method of fabricating an electrostatic chuck | Manoocher Birang, John F. Cameron, Chandra Deshpandey, Alfred Goldspeil, Ron Northrup +2 more | 2003-05-06 |
| 6538872 | Electrostatic chuck having heater and method | You Wang, Arnold Kholodenko, Alexander Veytser, Surinder Bedi, Kadthala Ramaya Narendrnath +4 more | 2003-03-25 |
| 6503368 | Substrate support having bonded sections and method | Arnold Kholodenko, Vijay D. Parkhe, You Wang, Wing Cheng, Alexander Veytser | 2003-01-07 |