Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6557248 | Method of fabricating an electrostatic chuck | Shamouil Shamouilian, Manoocher Birang, John F. Cameron, Chandra Deshpandey, Ron Northrup +2 more | 2003-05-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6557248 | Method of fabricating an electrostatic chuck | Shamouil Shamouilian, Manoocher Birang, John F. Cameron, Chandra Deshpandey, Ron Northrup +2 more | 2003-05-06 |