Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6557248 | Method of fabricating an electrostatic chuck | Shamouil Shamouilian, Manoocher Birang, John F. Cameron, Alfred Goldspeil, Ron Northrup +2 more | 2003-05-06 |
| 6535372 | Controlled resistivity boron nitride electrostatic chuck apparatus for retaining a semiconductor wafer and method of fabricating the same | Vijay D. Parkhe | 2003-03-18 |