Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6581612 | Chamber cleaning with fluorides of iodine | Shamouil Shamouilian, Pavel Ionov, Pamanabhan Krishnaraj | 2003-06-24 |
| 6569775 | Method for enhancing plasma processing performance | John M. Yamartino, Hui Chen, Diana Xiaobing Ma | 2003-05-27 |
| 6566272 | Method for providing pulsed plasma during a portion of a semiconductor wafer process | Alex Paterson, John M. Yamartino, Wade Zawalski | 2003-05-20 |
| 6558564 | Plasma energy control by inducing plasma instability | Wade Zawalski | 2003-05-06 |
| 6508198 | Automatic tuning in a tapped RF transformer inductive source of a plasma reactor for processing a semiconductor wafer | Daniel J. Hoffman, Victor H. Fuentes, Qiwei Liang | 2003-01-21 |
| 6503367 | Magnetically enhanced inductively coupled plasma reactor with magnetically confined plasma | Gerald Yin, Philip M. Salzman | 2003-01-07 |