Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667577 | Plasma reactor with spoke antenna having a VHF mode with the spokes in phase | Steven C. Shannon, Chunshi Cui, Yan Ye, Gerardo Delgadino, Douglas A. Buchberger, Jr. +4 more | 2003-12-23 |
| 6652712 | Inductive antenna for a plasma reactor producing reduced fluorine dissociation | Shiang-Bau Wang, Chunshi Cui, Yan Ye, Gerardo Delgadino, David Brian McParland +3 more | 2003-11-25 |
| 6528751 | Plasma reactor with overhead RF electrode tuned to the plasma | Gerald Yin | 2003-03-04 |
| 6508198 | Automatic tuning in a tapped RF transformer inductive source of a plasma reactor for processing a semiconductor wafer | Peter Loewenhardt, Victor H. Fuentes, Qiwei Liang | 2003-01-21 |