Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667577 | Plasma reactor with spoke antenna having a VHF mode with the spokes in phase | Daniel J. Hoffman, Chunshi Cui, Yan Ye, Gerardo Delgadino, Douglas A. Buchberger, Jr. +4 more | 2003-12-23 |
| 6652712 | Inductive antenna for a plasma reactor producing reduced fluorine dissociation | Shiang-Bau Wang, Daniel J. Hoffman, Chunshi Cui, Yan Ye, Gerardo Delgadino +3 more | 2003-11-25 |