Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6598559 | Temperature controlled chamber | Kim Vellore, Erwin Polar | 2003-07-29 |
| 6508198 | Automatic tuning in a tapped RF transformer inductive source of a plasma reactor for processing a semiconductor wafer | Daniel J. Hoffman, Peter Loewenhardt, Victor H. Fuentes | 2003-01-21 |