Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6508198 | Automatic tuning in a tapped RF transformer inductive source of a plasma reactor for processing a semiconductor wafer | Daniel J. Hoffman, Peter Loewenhardt, Qiwei Liang | 2003-01-21 |