Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6581612 | Chamber cleaning with fluorides of iodine | Peter Loewenhardt, Shamouil Shamouilian, Pamanabhan Krishnaraj | 2003-06-24 |
| 6537918 | Method for etching silicon oxynitride and dielectric antireflection coatings | Sung Ho Kim, Dean Li, Chun Yan, James C. Wang | 2003-03-25 |