Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6537918 | Method for etching silicon oxynitride and dielectric antireflection coatings | Pavel Ionov, Sung Ho Kim, Dean Li, Chun Yan | 2003-03-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6537918 | Method for etching silicon oxynitride and dielectric antireflection coatings | Pavel Ionov, Sung Ho Kim, Dean Li, Chun Yan | 2003-03-25 |