Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635577 | Method for reducing topography dependent charging effects in a plasma enhanced semiconductor wafer processing system | Peter K. Loewengardt, Kenlin Huang, Diana Xiaobing Ma | 2003-10-21 |
| 6569775 | Method for enhancing plasma processing performance | Peter Loewenhardt, Hui Chen, Diana Xiaobing Ma | 2003-05-27 |
| 6566272 | Method for providing pulsed plasma during a portion of a semiconductor wafer process | Alex Paterson, Peter Loewenhardt, Wade Zawalski | 2003-05-20 |