Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6545420 | Plasma reactor using inductive RF coupling, and processes | Kenneth S. Collins, John Trow, Chan-Lon Yang, Jerry Wong, Jeffrey Marks +6 more | 2003-04-08 |
| 6518195 | Plasma reactor using inductive RF coupling, and processes | Kenneth S. Collins, Chan-Lon Yang, Jerry Wong, Jeffrey Marks, Peter Keswick +7 more | 2003-02-11 |
| 6514376 | Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna | Kenneth S. Collins, Michael R. Rice, Eric Askarinam, Douglas A. Buchberger, Jr. | 2003-02-04 |