Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635565 | Method of cleaning a dual damascene structure | Chih-Ning Wu, Sun-Chieh Chien | 2003-10-21 |
| 6554002 | Method for removing etching residues | Chih-Ning Wu, Cheng-Yuan Tsai | 2003-04-29 |
| 6545420 | Plasma reactor using inductive RF coupling, and processes | Kenneth S. Collins, Craig A. Roderick, John Trow, Jerry Wong, Jeffrey Marks +6 more | 2003-04-08 |
| 6528428 | Method of forming dual damascene structure | Tong-Yu Chen | 2003-03-04 |
| 6518195 | Plasma reactor using inductive RF coupling, and processes | Kenneth S. Collins, Jerry Wong, Jeffrey Marks, Peter Keswick, David W. Groechel +7 more | 2003-02-11 |