Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6634313 | High-frequency electrostatically shielded toroidal plasma and radical source | Hiroji Hanawa, Kenneth S. Collins, David Stover, Fernando Silveira | 2003-10-21 |
| 6623596 | Plasma reactor having an inductive antenna coupling power through a parallel plate electrode | Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Eric Askarinam, Joshua Chiu-Wing Tsui +2 more | 2003-09-23 |
| 6545420 | Plasma reactor using inductive RF coupling, and processes | Kenneth S. Collins, Craig A. Roderick, Chan-Lon Yang, Jerry Wong, Jeffrey Marks +6 more | 2003-04-08 |
| 6524432 | Parallel-plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density | Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Eric Askarinam, Joshua Chiu-Wing Tsui +2 more | 2003-02-25 |
| 6518195 | Plasma reactor using inductive RF coupling, and processes | Kenneth S. Collins, Chan-Lon Yang, Jerry Wong, Jeffrey Marks, Peter Keswick +7 more | 2003-02-11 |