Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6634313 | High-frequency electrostatically shielded toroidal plasma and radical source | Kenneth S. Collins, John Trow, David Stover, Fernando Silveira | 2003-10-21 |
| 6551446 | Externally excited torroidal plasma source with a gas distribution plate | Yan Ye, Kenneth S. Collins, Kartik Ramaswamy, Andrew Nguyen, Tsutomu Tanaka | 2003-04-22 |