Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6634313 | High-frequency electrostatically shielded toroidal plasma and radical source | Hiroji Hanawa, Kenneth S. Collins, John Trow, Fernando Silveira | 2003-10-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6634313 | High-frequency electrostatically shielded toroidal plasma and radical source | Hiroji Hanawa, Kenneth S. Collins, John Trow, Fernando Silveira | 2003-10-21 |