Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670715 | Bilayer silicon carbide based barrier | Neng-Hui Yang, Hsin-Chang Wu | 2003-12-30 |
| 6653204 | Method of forming a shallow trench isolation structure | Hsin-Chang Wu, Neng-Hui Yang, Wen-Hsun Lin | 2003-11-25 |
| 6599826 | Method for fabricating a low dielectric constant material layer | Tsung-Tang Hsieh | 2003-07-29 |
| 6554002 | Method for removing etching residues | Chih-Ning Wu, Chan-Lon Yang | 2003-04-29 |
| 6521300 | Method of a surface treatment in improving adhesion of an organic polymeric low-k dielectric layer | Tsung-Tang Hsieh, Hsin-Chang Wu, Chih-An Huang | 2003-02-18 |
| 6521545 | Method of a surface treatment on a fluorinated silicate glass film | Neng-Hui Yang, Chinh-Fu Lin, Yi-Fang Cheng | 2003-02-18 |