Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670715 | Bilayer silicon carbide based barrier | Cheng-Yuan Tsai, Hsin-Chang Wu | 2003-12-30 |
| 6653204 | Method of forming a shallow trench isolation structure | Hsin-Chang Wu, Cheng-Yuan Tsai, Wen-Hsun Lin | 2003-11-25 |
| 6596652 | Method of fabricating low dielectric constant film | Ming-Sheng Yang | 2003-07-22 |
| 6521545 | Method of a surface treatment on a fluorinated silicate glass film | Chinh-Fu Lin, Yi-Fang Cheng, Cheng-Yuan Tsai | 2003-02-18 |