Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669858 | Integrated low k dielectrics and etch stops | Claes Bjorkman, Min Melissa Yu, Hongquing Shan, David Cheung, Wai-Fan Yau +7 more | 2003-12-30 |
| 6627532 | Method of decreasing the K value in SiOC layer deposited by chemical vapor deposition | Frederic Gaillard, Li-Qun Xia, Tian-Hoe Lim, Ellie Yieh, Wai-Fan Yau +2 more | 2003-09-30 |
| 6593247 | Method of depositing low k films using an oxidizing plasma | Tzu-Fang Huang, Yung-Cheng Lu, Li-Qun Xia, Ellie Yieh, Wai-Fan Yau +5 more | 2003-07-15 |
| 6511903 | Method of depositing a low k dielectric with organo silane | Wai-Fan Yau, David Cheung, Shin-Puu Jeng, Yung-Cheng Yu | 2003-01-28 |
| 6511909 | Method of depositing a low K dielectric with organo silane | Wai-Fan Yau, David Cheung, Shin-Puu Jeng, Yung-Cheng Yu | 2003-01-28 |