Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635575 | Methods and apparatus to enhance properties of Si-O-C low K films | Li-Qun Xia, Frederic Gaillard, Ellie Yieh | 2003-10-21 |
| 6632478 | Process for forming a low dielectric constant carbon-containing film | Frederic Gaillard, Li-Qun Xia, Jen Shu, Ellie Yieh | 2003-10-14 |
| 6627532 | Method of decreasing the K value in SiOC layer deposited by chemical vapor deposition | Frederic Gaillard, Li-Qun Xia, Ellie Yieh, Wai-Fan Yau, Shin-Puu Jeng +2 more | 2003-09-30 |
| 6614181 | UV radiation source for densification of CVD carbon-doped silicon oxide films | Keith Harvey, Li-Qun Xia | 2003-09-02 |
| 6602806 | Thermal CVD process for depositing a low dielectric constant carbon-doped silicon oxide film | Li-Qun Xia, Fabrice Geiger, Frederic Gaillard, Ellie Yieh | 2003-08-05 |
| 6583497 | Surface treatment of c-doped SiO2 film to enhance film stability during O2 ashing | Li-Qun Xia, Frederic Gaillard, Ellie Yieh | 2003-06-24 |
| 6573196 | Method of depositing organosilicate layers | Frederick Gaillard, Li-Qun Xia, Ellie Yieh | 2003-06-03 |
| 6566278 | Method for densification of CVD carbon-doped silicon oxide films through UV irradiation | Keith Harvey, Li-Qun Xia | 2003-05-20 |
| 6528116 | Lid cooling mechanism and method for optimized deposition of low-k dielectric using tri methylsilane-ozone based processes | Himansu Pokharna, Li-Qun Xia | 2003-03-04 |