Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6602806 | Thermal CVD process for depositing a low dielectric constant carbon-doped silicon oxide film | Li-Qun Xia, Frederic Gaillard, Ellie Yieh, Tian-Hoe Lim | 2003-08-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6602806 | Thermal CVD process for depositing a low dielectric constant carbon-doped silicon oxide film | Li-Qun Xia, Frederic Gaillard, Ellie Yieh, Tian-Hoe Lim | 2003-08-05 |