Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6528116 | Lid cooling mechanism and method for optimized deposition of low-k dielectric using tri methylsilane-ozone based processes | Li-Qun Xia, Tian-Hoe Lim | 2003-03-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6528116 | Lid cooling mechanism and method for optimized deposition of low-k dielectric using tri methylsilane-ozone based processes | Li-Qun Xia, Tian-Hoe Lim | 2003-03-04 |