Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6632478 | Process for forming a low dielectric constant carbon-containing film | Frederic Gaillard, Li-Qun Xia, Ellie Yieh, Tian-Hoe Lim | 2003-10-14 |
| 6593615 | Dielectric gap fill process that effectively reduces capacitance between narrow metal lines using HDP-CVD | Michael E. Thomas | 2003-07-15 |
| 6576345 | Dielectric films with low dielectric constants | Patrick A. Van Cleemput, Ravi Laxman, Michelle T. Schulberg, Bunsen B. Nie | 2003-06-10 |