Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6576345 | Dielectric films with low dielectric constants | Ravi Laxman, Jen Shu, Michelle T. Schulberg, Bunsen B. Nie | 2003-06-10 |
| 6550484 | Apparatus for maintaining wafer back side and edge exclusion during supercritical fluid processing | Sanjay Gopinath, Francisco Juarez, Krishnan Shrinivasan | 2003-04-22 |