Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6563092 | Measurement of substrate temperature in a process chamber using non-contact filtered infrared pyrometry | Arkadiy Shimanovich, Prasad N. Gadgil | 2003-05-13 |
| 6550484 | Apparatus for maintaining wafer back side and edge exclusion during supercritical fluid processing | Sanjay Gopinath, Patrick A. Van Cleemput, Francisco Juarez | 2003-04-22 |