Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6563092 | Measurement of substrate temperature in a process chamber using non-contact filtered infrared pyrometry | Krishnan Shrinivasan, Arkadiy Shimanovich | 2003-05-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6563092 | Measurement of substrate temperature in a process chamber using non-contact filtered infrared pyrometry | Krishnan Shrinivasan, Arkadiy Shimanovich | 2003-05-13 |