Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6614181 | UV radiation source for densification of CVD carbon-doped silicon oxide films | Tian-Hoe Lim, Li-Qun Xia | 2003-09-02 |
| 6566278 | Method for densification of CVD carbon-doped silicon oxide films through UV irradiation | Tian-Hoe Lim, Li-Qun Xia | 2003-05-20 |