Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660663 | Computer readable medium for holding a program for performing plasma-assisted CVD of low dielectric constant films formed from organosilane compounds | David Cheung, Wai-Fan Yau | 2003-12-09 |
| 6537929 | CVD plasma assisted low dielectric constant films | David Cheung, Wai-Fan Yau | 2003-03-25 |