Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6605177 | Substrate support with gas feed-through and method | Hamid Noorbakhsh, Robert Greenway | 2003-08-12 |
| 6568346 | Distributed inductively-coupled plasma source and circuit for coupling induction coils to RF power supply | Bryan Pu, Hongching Shan, Claes Bjorkman, Kenny L. Doan, Mike Welch | 2003-05-27 |
| 6539621 | Safety guard for an RF connector | William Taylor, Mark W. Curry | 2003-04-01 |