Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613691 | Highly selective oxide etch process using hexafluorobutadiene | Raymond Hung, Joseph P. Caulfield, Ruiping Wang, Gerald Yin | 2003-09-02 |
| 6568346 | Distributed inductively-coupled plasma source and circuit for coupling induction coils to RF power supply | Bryan Pu, Claes Bjorkman, Kenny L. Doan, Mike Welch, Richard R. Mett | 2003-05-27 |
| 6513452 | Adjusting DC bias voltage in plasma chamber | Evans Lee, Michael Welch, Robert Wu, Bryan Pu, Paul Luscher +2 more | 2003-02-04 |