Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6647918 | Double slit-valve doors for plasma processing | Michael Welch, Homgqing Shan, Paul Luscher, James D. Carducci, Siamak Salimian | 2003-11-18 |
| 6513452 | Adjusting DC bias voltage in plasma chamber | Hongching Shan, Michael Welch, Robert Wu, Bryan Pu, Paul Luscher +2 more | 2003-02-04 |