Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6647918 | Double slit-valve doors for plasma processing | Michael Welch, Homgqing Shan, Paul Luscher, Evans Lee, Siamak Salimian | 2003-11-18 |
| 6589361 | Configurable single substrate wet-dry integrated cluster cleaner | Paul Luscher, Siamak Salimian | 2003-07-08 |
| 6562189 | Plasma reactor with a tri-magnet plasma confinement apparatus | Efrain Quiles, Hamid Noorbakhsh | 2003-05-13 |
| 6513452 | Adjusting DC bias voltage in plasma chamber | Hongching Shan, Evans Lee, Michael Welch, Robert Wu, Bryan Pu +2 more | 2003-02-04 |