Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6647918 | Double slit-valve doors for plasma processing | Michael Welch, Homgqing Shan, Paul Luscher, Evans Lee, James D. Carducci | 2003-11-18 |
| 6589361 | Configurable single substrate wet-dry integrated cluster cleaner | Paul Luscher, James D. Carducci | 2003-07-08 |
| 6575622 | Correction of wafer temperature drift in a plasma reactor based upon continuous wafer temperature measurements using an in-situ wafer temperature optical probe | Hamid Norrbakhsh, Mike Welch, Paul Luscher, Brad L. Mays | 2003-06-10 |