Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6575622 | Correction of wafer temperature drift in a plasma reactor based upon continuous wafer temperature measurements using an in-situ wafer temperature optical probe | Hamid Norrbakhsh, Mike Welch, Paul Luscher, Siamak Salimian | 2003-06-10 |