Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6575622 | Correction of wafer temperature drift in a plasma reactor based upon continuous wafer temperature measurements using an in-situ wafer temperature optical probe | Hamid Norrbakhsh, Paul Luscher, Siamak Salimian, Brad L. Mays | 2003-06-10 |
| 6568346 | Distributed inductively-coupled plasma source and circuit for coupling induction coils to RF power supply | Bryan Pu, Hongching Shan, Claes Bjorkman, Kenny L. Doan, Richard R. Mett | 2003-05-27 |