Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613689 | Magnetically enhanced plasma oxide etch using hexafluorobutadiene | Jingbao Liu, Takehiko Komatsu, Hongqing Shan, Keji Horioka | 2003-09-02 |
| 6568346 | Distributed inductively-coupled plasma source and circuit for coupling induction coils to RF power supply | Hongching Shan, Claes Bjorkman, Kenny L. Doan, Mike Welch, Richard R. Mett | 2003-05-27 |
| 6513452 | Adjusting DC bias voltage in plasma chamber | Hongching Shan, Evans Lee, Michael Welch, Robert Wu, Paul Luscher +2 more | 2003-02-04 |