Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613689 | Magnetically enhanced plasma oxide etch using hexafluorobutadiene | Jingbao Liu, Takehiko Komatsu, Hongqing Shan, Bryan Pu | 2003-09-02 |
KH
Keji Horioka
Overall (2003): #181,350 of 273,478Top 70%
1
Patents 2003