TK

Takehiko Komatsu

Applied Materials: 1 patents #371 of 884Top 45%
📍 Chiba, CA: #8 of 13 inventorsTop 65%
Overall (2003): #109,994 of 273,478Top 45%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6613689 Magnetically enhanced plasma oxide etch using hexafluorobutadiene Jingbao Liu, Hongqing Shan, Keji Horioka, Bryan Pu 2003-09-02