Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613689 | Magnetically enhanced plasma oxide etch using hexafluorobutadiene | Jingbao Liu, Takehiko Komatsu, Keji Horioka, Bryan Pu | 2003-09-02 |
| 6602434 | Process for etching oxide using hexafluorobutadiene or related fluorocarbons and manifesting a wide process window | Hoiman Hung, Joseph P. Caulfield, Ruiping Wang, Gerald Yin | 2003-08-05 |
| 6521082 | Magnetically enhanced plasma apparatus and method with enhanced plasma uniformity and enhanced ion energy control | Michael Barnes | 2003-02-18 |